【摘要】：對硅/玻璃陽極鍵合進(jìn)行了實驗技術(shù)研究,闡述了實驗設(shè)計思路;確定了實驗的內(nèi)容和方法,據(jù)此研制出能直觀顯示硅/玻璃界面鍵合情況以及鍵合電流-時間曲線的多功能鍵合實驗儀。通過鍵合操作、現(xiàn)象觀察和深入分析,使學(xué)生更加深入了解鍵合機(jī)理、掌握影響鍵合效果與效率的主要因素。該實驗技術(shù)有助于提升學(xué)生的動手能力、分析能力以及綜合素質(zhì)。
[Abstract]:The experimental technology of silicon / glass anode bonding is studied, and the experimental design idea is expounded. The contents and methods of the experiment are determined, and a multifunctional bonding experimental instrument is developed, which can intuitively display the bonding of silicon / glass interface and the bonding current-time curve. Through bonding operation, phenomenon observation and in-depth analysis, the students can understand the bonding mechanism more deeply and master the main factors that affect the bonding effect and efficiency. This experimental technique is helpful to improve students' practical ability, analytical ability and comprehensive quality.
【作者單位】： 哈爾濱工業(yè)大學(xué)航天學(xué)院;
【基金】：黑龍江省自然科學(xué)基金項目(E200917) 哈爾濱工業(yè)大學(xué)教學(xué)實驗室建設(shè)項目
【分類號】：TN405

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