發(fā)布時(shí)間：2019-05-14 16:33

【摘要】：對硅/玻璃陽極鍵合進(jìn)行了實(shí)驗(yàn)技術(shù)研究,闡述了實(shí)驗(yàn)設(shè)計(jì)思路;確定了實(shí)驗(yàn)的內(nèi)容和方法,據(jù)此研制出能直觀顯示硅/玻璃界面鍵合情況以及鍵合電流-時(shí)間曲線的多功能鍵合實(shí)驗(yàn)儀。通過鍵合操作、現(xiàn)象觀察和深入分析,使學(xué)生更加深入了解鍵合機(jī)理、掌握影響鍵合效果與效率的主要因素。該實(shí)驗(yàn)技術(shù)有助于提升學(xué)生的動(dòng)手能力、分析能力以及綜合素質(zhì)。
[Abstract]:The experimental technology of silicon / glass anode bonding is studied, and the experimental design idea is expounded. The contents and methods of the experiment are determined, and a multifunctional bonding experimental instrument is developed, which can intuitively display the bonding of silicon / glass interface and the bonding current-time curve. Through bonding operation, phenomenon observation and in-depth analysis, the students can understand the bonding mechanism more deeply and master the main factors that affect the bonding effect and efficiency. This experimental technique is helpful to improve students' practical ability, analytical ability and comprehensive quality.
【作者單位】： 哈爾濱工業(yè)大學(xué)航天學(xué)院;
【基金】：黑龍江省自然科學(xué)基金項(xiàng)目(E200917) 哈爾濱工業(yè)大學(xué)教學(xué)實(shí)驗(yàn)室建設(shè)項(xiàng)目
【分類號(hào)】：TN405

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