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基于LTCC的無線無源雙參數(shù)傳感器

發(fā)布時間:2018-06-02 18:39

  本文選題:無線無源 + 雙參數(shù); 參考:《傳感技術(shù)學報》2017年04期


【摘要】:設(shè)計了一個基于低溫共燒陶瓷(LTCC)技術(shù)的無線無源雙參數(shù)傳感器,傳感器基于LC(inductor-Capacitor)諧振原理,詢問天線通過無線遙測的方式獲取傳感器的壓力和溫度信號。在傳感器基板上集成了兩個LC諧振回路,諧振回路中兩個電容分別對壓力和溫度參數(shù)敏感,同時兩電感采用特殊結(jié)構(gòu)來減少雙參數(shù)在測試時的互感串擾。搭建了溫度-壓力復合測試平臺,對傳感器進行了相關(guān)測試。傳感器最高測試溫度為300℃,溫度靈敏度為-14.27 k Hz/℃,壓力靈敏-13.75 k Hz/k Pa,實驗結(jié)果表明,這種設(shè)計能明顯減少兩參數(shù)之間的互感影響。
[Abstract]:A wireless passive two-parameter sensor based on low temperature co-fired ceramic LTCC technology is designed. The sensor is based on the LC inductor-Capacitor resonance principle. The sensor can obtain the pressure and temperature signals of the sensor by wireless telemetry. Two LC resonant circuits are integrated on the sensor substrate, in which the two capacitors are sensitive to the pressure and temperature parameters, and the two inductors adopt a special structure to reduce the mutual inductance crosstalk between the two parameters in the test. The temperature-pressure compound test platform was built and the sensor was tested. The maximum temperature of the sensor is 300C, the temperature sensitivity is -14.27k Hz/ 鈩,

本文編號:1969783

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