氧化鈮(鉭)薄膜的制備及表征
[Abstract]:Because of its bright color, high saturation, friendly environment and easy wavelength control, oxide film with structural color has a wide application prospect in the field of anti-counterfeiting, decoration and sensor. Among them, the anodic oxidation method has the advantages of simple preparation process, controllable conditions and wide range of practical application. For example, the anodic alumina (PAA) film not only has controllable structure color, but also has regular hexagonal dense stacked pore distribution, which results in many other physical properties (such as ferromagnetism, resistive property, etc.) besides the structural color. It is found that these properties are closely related to porous structure. In this paper, niobium oxide and tantalum oxide thin films with ordered porous structure were prepared by anodizing method. The structure and physical properties of the films were studied by a series of measurement and characterization methods. The results are as follows: (1) niobium oxide films with structure color were prepared by one anodization at room temperature for the niobium foil. It is found that the saturation and wavelength range of niobium oxide films can be regulated by changing the oxidation voltage, and the thickness of niobium oxide films increases with the increase of oxidation voltage at the same time. Based on the experimental results, the color generation mechanism of niobium oxide film is analyzed. It is found that when the thickness of niobium oxide film is less than 150nm, the structure color is caused by light scattering, which conforms to the principle of complementary color. When the thickness of the film is larger than 150nm, the structure color is produced by interference of light, which satisfies the Bragg formula. (2) the ordered porous niobium oxide film is obtained by the secondary anodization of the niobium oxide film prepared by the primary anodizing method. It is found that the depth of the pore increases with the increase of the oxidation voltage at the same time, and the surface of the film is connected in a trench shape. The results of magnetic measurement show that the porous niobium oxide films exhibit ferromagnetism at room temperature under different conditions, and the magnetization of the films is M _ Karabakh M _ /; After air annealing, the magnetization changes of the films meet the requirements of M _ (prepared) M _ (air) annealing for 2h and M _ (air) annealing for 3 h. These phenomena indicate that the variation of magnetization is closely related to the oxygen vacancies in the films. (3) A series of porous tantalum oxide films have been prepared by secondary anodization at room temperature, and the structure and properties of the films have been characterized. The results show that the porous tantalum oxide films are ferromagnetic at room temperature, and the magnetization of the films is M _ 螕 M _ /. After annealing in different atmosphere, It is found that the magnetization of the films varies from M _ (vacuum annealing) M _ (prepared state to M _ air annealing). When the annealing time is prolonged, the magnetization of the film can meet the requirement of M _ (prepared state) M _ (air annealing for 2h) and M _ (air) annealing for 4h. These phenomena indicate that tantalum oxide films have ferromagnetic properties at room temperature. It is further proved that the magnetic properties of the films are related to the oxygen vacancy concentration.
【學(xué)位授予單位】:河北師范大學(xué)
【學(xué)位級(jí)別】:碩士
【學(xué)位授予年份】:2017
【分類號(hào)】:O484.1
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