【摘要】：靜壓氣體軸承是超精密運動平臺的核心部件，以其無摩擦、高速度、極高的精度等優(yōu)點廣泛應(yīng)用于精密測量和精微加工領(lǐng)域，它的研究進(jìn)展在一定程度上推動著相關(guān)產(chǎn)業(yè)的向前發(fā)展。隨著超精密運動平臺向著更高的精度挑戰(zhàn)，進(jìn)一步分析靜壓氣體軸承的承載和穩(wěn)定性能顯得尤為重要，而氣體軸承的幾何結(jié)構(gòu)尺寸與其氣膜間隙比例達(dá)到1000:1以上，如此巨大的比例導(dǎo)致網(wǎng)格劃分困難以及網(wǎng)格數(shù)量非常龐大，從而使得計算效率很低。因此，本文所要研究的正是針對靜壓氣體軸承以上難點所提出的跨尺度數(shù)值計算分析方法。 首先，本文介紹了靜壓氣體軸承的工作原理和跨尺度數(shù)值計算模型，并通過聯(lián)立描述流體運動的控制方程和氣體狀態(tài)方程推導(dǎo)出了氣體潤滑雷諾方程的一般形式。 其次，給出了運用跨尺度數(shù)值計算方法計算分析無壓力腔和有壓力腔靜壓氣體軸承的一般流程，同時采用該方法求出了無壓力腔和有壓力腔氣體軸承在二維情況下的壓力分布。 最后，應(yīng)用計算流體力學(xué)軟件FLUENT計算分析了氣體軸承節(jié)流孔及壓力腔區(qū)域的壓力分布和靜態(tài)性能，同時運用有限差分法求解了描述氣膜壓力分布的穩(wěn)態(tài)雷諾方程，且通過利用MATLAB軟件求解離散化后的雷諾方程求出了氣膜區(qū)域的壓力分布，進(jìn)而計算出氣膜區(qū)域的靜承載力和靜剛度，將兩個區(qū)域的靜承載力和靜剛度值加起來即組成了整個氣體軸承的靜態(tài)性能的值。并且將跨尺度計算結(jié)果與FLUENT仿真結(jié)果進(jìn)行對比，結(jié)果表明靜壓氣體軸承的跨尺度數(shù)值計算方法是可行的。
[Abstract]:Hydrostatic gas bearing is the core component of ultra-precision motion platform. It is widely used in precision measurement and micro-machining fields because of its advantages of non-friction, high speed, high precision and so on. Its research progress promotes the development of related industries to a certain extent. With the ultra-precision motion platform facing the challenge of higher precision, it is particularly important to further analyze the bearing capacity and stability performance of the static gas bearing, and the ratio of the geometric structure of the gas bearing to its gas film clearance is more than 1000: 1. Such a large scale makes gridding difficult and the number of meshes is very large, which makes the computing efficiency very low. Therefore, this paper is to study the above difficulties of hydrostatic gas bearings proposed by the cross-scale numerical analysis method. Firstly, this paper introduces the working principle and cross-scale numerical calculation model of hydrostatic gas bearing, and deduces the general form of gas lubricating Reynolds equation by means of the governing equation and gas state equation which describe the fluid motion simultaneously. Secondly, the general flow chart of calculating and analyzing the hydrostatic gas bearing without pressure cavity and pressure chamber by using the cross scale numerical calculation method is given, and the pressure distribution of the gas bearing without pressure chamber and pressure chamber is obtained by using this method. Finally, the pressure distribution and static performance in the throttle and pressure chamber region of the gas bearing are calculated and analyzed by the computational fluid dynamics software FLUENT, and the steady state Reynolds equation describing the gas film pressure distribution is solved by using the finite difference method. The pressure distribution in the film region is obtained by solving the discrete Reynolds equation with MATLAB software, and the static bearing capacity and stiffness of the film region are calculated. The static bearing capacity and static stiffness of the two regions are added together to form the static performance value of the whole gas bearing. The results of cross-scale calculation are compared with the results of FLUENT simulation. The results show that the cross-scale numerical method for static pressure gas bearings is feasible.
【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2013
【分類號】：TH133.36

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