本文選題：TiAlSiN涂層　切入點：真空熱處理　出處：《中國表面工程》2017年01期

【摘要】：為提高TiAlSiN涂層的力學(xué)性能,研究了真空熱處理對多弧離子鍍TiAlSiN涂層微觀組織和力學(xué)性能的影響。利用掃描電子顯微鏡(SEM)、X射線衍射儀(XRD)、自動劃痕儀、納米壓痕儀、摩擦磨損測試儀等表征其表面形貌、物相組成和力學(xué)性能。結(jié)果表明:熱處理引起了涂層的晶格畸變,降低了TiN固溶體相的平均晶格常數(shù),導(dǎo)致其衍射峰向高角度偏移;熱處理會粗化涂層表面,并導(dǎo)致TiAlSi中間過渡層界面消失。經(jīng)過800℃熱處理后,涂層的納米硬度和結(jié)合力達到最大值,分別為35.01 GPa和54.45 N;涂層的平均摩擦因數(shù)最小,由熱處理前的0.679降低至0.372,比熱處理前下降了約45.2%。
[Abstract]:In order to improve the mechanical properties of TiAlSiN coatings, the effect of vacuum heat treatment on the microstructure and mechanical properties of multi-arc ion plating TiAlSiN coatings was studied.The surface morphology, phase composition and mechanical properties were characterized by scanning electron microscope (SEM), automatic scratch tester, nano-indentation instrument and friction and wear tester.The results show that the lattice distortion of the coating is induced by heat treatment, the average lattice constant of TiN solid solution phase is reduced, and the diffraction peak is shifted to a high angle, and the surface of the coating is coarsened and the interface of the TiAlSi intermediate layer disappears after heat treatment.After heat treatment at 800 鈩，

本文編號：1692862