【摘要】：提出了陣列式芯片特定區(qū)域內(nèi)微流體的加熱方法,研制了4×4陣列式聚二甲基硅氧烷芯片及其特定區(qū)域的加熱組件。在128°YX-LiNbO3基片上光刻16個叉指換能器,其激發(fā)的SAW驅(qū)動壓電基片上油相流體,使其輸運(yùn)到待加熱區(qū)的傳熱柱上,在油相流體兩側(cè)的叉指換能器上加電信號,激發(fā)SAW加熱油相流體,并通過傳熱柱加熱陣列式芯片受熱區(qū)內(nèi)微流體。以石蠟油微流體為實驗對象進(jìn)行陣列式芯片特定區(qū)域微流體加熱實驗,結(jié)果表明,SAW可有效加熱陣列式芯片特定區(qū)域內(nèi)石蠟油微流體,在30.0dBm電信號功率作用下,使7.5μL石蠟油溫度從22.3℃上升到33.5℃。
[Abstract]:The heating method of microfluidic in the specific region of array chip is proposed, and the 4 脳 4 array polydimethyl siloxane chip and its heating module in specific region are developed. 16 InterDigital Transducers are lithography on 128擄 YX-LiNbO3 substrate. The excited SAW drives the oil phase fluid on the piezoelectric substrate so that it can be transported to the heat transfer column in the zone to be heated, and the electrical signal is added to the InterDigital Transducer on both sides of the oil phase fluid. SAW is excited to heat the oil phase fluid, and the microfluidic in the heating zone of the array chip is heated by the heat transfer column. Taking paraffin oil microfluid as the experimental object, the microfluid heating experiment in the specific area of the array chip is carried out. the results show that SAW can effectively heat the paraffin oil microfluid in the specific area of the array chip, and under the action of 30.0dBm electrical signal power, The temperature of 7.5 渭 L paraffin oil increased from 22.3 鈩，

本文編號：2477639