【摘要】：熱光可調(diào)諧濾波器是一種新的光學(xué)器件,在光纖通信、激光調(diào)諧、光譜分析以及紅外探測等諸多領(lǐng)域有著廣泛的應(yīng)用。這種器件利用材料的熱光效應(yīng),可以實(shí)現(xiàn)中心波長移動的調(diào)諧濾波,具有調(diào)諧范圍大、工藝制作方便以及結(jié)構(gòu)簡單的優(yōu)點(diǎn)。針對濾波器性能實(shí)現(xiàn)器件結(jié)構(gòu)設(shè)計(jì)、根據(jù)實(shí)驗(yàn)條件確定濾波器的工藝實(shí)現(xiàn)方案以及濾波器結(jié)構(gòu)中各膜層的變化均是對器件性能產(chǎn)生影響的關(guān)鍵所在,因此,本文利用理論分析濾波器的結(jié)構(gòu)特性,在此基礎(chǔ)上進(jìn)行優(yōu)化和選擇,并從工藝上考慮并消除器件多層膜結(jié)構(gòu)帶來的問題,制作出濾波器件進(jìn)行測試,對熱光濾波器的應(yīng)用技術(shù)進(jìn)行初步探究。首先,通過對器件性能要求的分析確定合適的濾波器材料,從理論出發(fā)根據(jù)所選材料的參數(shù)對濾波器結(jié)構(gòu)進(jìn)行分析,確定濾波器基本結(jié)構(gòu)為具有半波長的中間腔層的單腔體,并對器件的熱調(diào)諧性能進(jìn)行了仿真研究,得到調(diào)諧靈敏度為0.1nm/℃。其次,通過分析器件對膜層的要求與工藝上實(shí)現(xiàn)的難點(diǎn),解決多層膜沉積中的膜層應(yīng)力、均勻性、各層接觸以及粗糙度問題,確定出制備各膜層的工藝參數(shù),對濾波器制作過程中可能引起的誤差進(jìn)行分析,在此基礎(chǔ)上完成單元濾波器的工藝制備。制備的樣品在1554 nm處獲得72%的透射率,SEM圖顯示器件中各膜層均勻連續(xù)且致密,沒有缺陷。利用搭建的熱光器件測試平臺對濾波器熱調(diào)諧性能進(jìn)行測試,其中心波長移動明顯,調(diào)諧靈敏度達(dá)到0.072 nm/℃,并且在不同位置處熱響應(yīng)變化不大,表現(xiàn)出良好的熱響應(yīng)均勻性。最后,將單元濾波器通過光刻實(shí)現(xiàn)陣列化以探究熱光調(diào)諧濾波器應(yīng)用技術(shù),并對濾波器性能進(jìn)行了表征分析,濾波器陣列分布均勻,尺寸保持一致,并通過溫度的變化控制濾波器的輸出光強(qiáng),在光開關(guān)與探測領(lǐng)域展現(xiàn)出良好的應(yīng)用前景,為后續(xù)研究打下基礎(chǔ)。
[Abstract]:Thermo-optical tunable filter is a new optical device, which has been widely used in many fields such as optical fiber communication, laser tuning, spectral analysis and infrared detection. By utilizing the thermo-optical effect of the material, the device can realize the tunable filter of center wavelength shift, which has the advantages of wide tuning range, convenient fabrication and simple structure. In order to realize the device structure design of filter performance, according to the experimental conditions, it is the key to determine the technological realization scheme of filter and the change of each film layer in the filter structure to influence the device performance. In this paper, the structure characteristics of the filter are analyzed theoretically, and the optimization and selection are carried out on this basis, and the problems caused by the multilayer membrane structure of the device are considered and eliminated in the process, and the filter parts are made for testing. The application technology of thermal optical filter is discussed. First of all, the suitable filter material is determined by analyzing the performance requirements of the device. The filter structure is analyzed according to the parameters of the selected material, and the basic structure of the filter is determined to be a single cavity with half a wavelength in the middle cavity. The thermal tuning performance of the device is simulated and the tuning sensitivity is obtained at 0.1nm/ 鈩，

本文編號：2261273