單晶硅成型加工刀具損耗建模分析與實(shí)驗(yàn)研究
發(fā)布時(shí)間：2018-09-07 10:37
【摘要】：放電成型加工中的刀具損耗直接影響著加工精度,在單晶Si放電加工可行性的基礎(chǔ)上,分析了峰值電流、脈沖寬度以及脈沖間隔對(duì)刀具損耗的影響。采用RSM中的中心組合設(shè)計(jì)實(shí)驗(yàn),建立了與峰值電流、脈沖寬度、脈沖間隔等工藝參數(shù)相關(guān)的刀具損耗預(yù)測(cè)模型,用Design-Expert 8.0對(duì)刀具損耗與工藝參數(shù)的2階響應(yīng)曲面進(jìn)行了分析。方差分析結(jié)果表明,預(yù)測(cè)模型具有較好的擬合程度和適應(yīng)性。采用滿意度函數(shù)(DFA)獲得了單晶Si放電加工刀具損耗的最佳工藝參數(shù)組合,最佳工藝參數(shù)下的實(shí)驗(yàn)結(jié)果與模型預(yù)測(cè)結(jié)果平均相對(duì)誤差為5.1%。驗(yàn)證實(shí)驗(yàn)表明,該模型對(duì)刀具損耗的預(yù)測(cè)是準(zhǔn)確的,并且能實(shí)現(xiàn)相應(yīng)的半導(dǎo)體材料的放電成型加工過(guò)程中的刀具損耗預(yù)測(cè)。
[Abstract]:Cutting tool loss directly affects machining accuracy in discharge forming. Based on the feasibility of single crystal Si discharge machining, the effects of peak current, pulse width and pulse interval on tool loss are analyzed. A tool loss prediction model related to peak current, pulse width and pulse interval was established by using the center combination design experiment in RSM. The second-order response surface between tool loss and process parameters was analyzed by Design-Expert 8.0. The results of variance analysis show that the prediction model has good fitting degree and adaptability. The optimum process parameters of tool loss for single crystal Si discharge machining were obtained by using the satisfaction function (DFA). The average relative error between the experimental results and the model prediction results was 5.1. The experimental results show that the model is accurate in predicting tool loss and can be used to predict the tool loss in the process of discharge molding of semiconductor materials.
【作者單位】： 西安理工大學(xué)機(jī)械與精密儀器工程學(xué)院;
【基金】：國(guó)家自然科學(xué)基金項(xiàng)目(51575442) 陜西省自然基金項(xiàng)目(2016JZ011) 陜西省教育廳基金(2014SZS10-Z01)
【分類號(hào)】：TN305.1
本文編號(hào)：2228021
[Abstract]:Cutting tool loss directly affects machining accuracy in discharge forming. Based on the feasibility of single crystal Si discharge machining, the effects of peak current, pulse width and pulse interval on tool loss are analyzed. A tool loss prediction model related to peak current, pulse width and pulse interval was established by using the center combination design experiment in RSM. The second-order response surface between tool loss and process parameters was analyzed by Design-Expert 8.0. The results of variance analysis show that the prediction model has good fitting degree and adaptability. The optimum process parameters of tool loss for single crystal Si discharge machining were obtained by using the satisfaction function (DFA). The average relative error between the experimental results and the model prediction results was 5.1. The experimental results show that the model is accurate in predicting tool loss and can be used to predict the tool loss in the process of discharge molding of semiconductor materials.
【作者單位】： 西安理工大學(xué)機(jī)械與精密儀器工程學(xué)院;
【基金】：國(guó)家自然科學(xué)基金項(xiàng)目(51575442) 陜西省自然基金項(xiàng)目(2016JZ011) 陜西省教育廳基金(2014SZS10-Z01)
【分類號(hào)】：TN305.1
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，本文編號(hào)：2228021
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